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Effects of Annealing and Oxygen/Nitrogen Ratio on Transmittance of Copper Oxynitride Thin Films |
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PP: 51-54 |
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Author(s) |
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Abraham Kirwa Tuwei,
Daniel Kipngetich Ketui,
Samson Muriuki Njogu,
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Abstract |
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| Copper oxynitride (CuOyNx) thin films were deposited on glass substrates by dc reactive magnetron sputtering at
room temperature and a pressure of 5 x 10-3 mbar with varying oxygen and nitrogen concentrations concurrently on each
film for 10 minutes. The oxygen concentration was increased from 2 sccm, 4 sccm, 6 sccm, 8 sccm and 10 sccm while that
of nitrogen was reduced from 8 sccm, 6 sccm, 4 sccm, 2 sccm and 0 sccm. The copper oxynitride thin films formed were
annealed at 200 0C and 300 0C and their optical properties measured. We observed that at oxygen to nitrogen ratio of 8:2,
there is a pronounced shifted of transmittance peak of CuOyNx from 610 nm to 810 nm for As-deposited and those annealed
at 300 0C. We concluded that CuOyNx has tunable optical properties. |
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